Nano-fabrication on Si oxide/Si surface by using STM: A low energy electron beam stimulated reaction

Applied Surface Science

Volumn 141, Issue 3-4, 1999, Pages 305-312

  Li, Nan ^a   Yoshinobu, T ^a   Iwasaki, H ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

61.16.Ch; 68.65.+g; 79.60.Jv; 81.65.Cf; E beam stimulated reaction; NAD; Nano fabrication; SBA; SF; Si oxide; SJ; STM

Indexed keywords

EID: 0039521653     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00516-9     Document Type: Article

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