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Volumn 10, Issue 4, 1999, Pages 389-393
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In situ thickness measurements of ultra-thin multilayer polymer films by atomic force microscopy
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
GLASS;
MULTILAYERS;
POLYELECTROLYTES;
SILICON WAFERS;
STIFFNESS;
THICKNESS MEASUREMENT;
ULTRATHIN FILMS;
FURROW METHOD;
PLASTIC FILMS;
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EID: 0033341347
PISSN: 09574484
EISSN: None
Source Type: Journal
DOI: 10.1088/0957-4484/10/4/305 Document Type: Article |
Times cited : (99)
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References (17)
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