New method to estimate step heights in scanning-probe microscope images

Nanotechnology

Volumn 8, Issue 1, 1997, Pages 6-9

  Edwards, Hal ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CREEP; FUNCTIONS; HYSTERESIS; MICROSCOPIC EXAMINATION; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; POLYNOMIALS;

POLYNOMIAL STEP FUNCTION FIT (PSFF); SCANNING PROBE MICROSCOPES (SPM);

IMAGE ANALYSIS;

EID: 0031099571     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/8/1/002     Document Type: Article

References (7)

1. A review of dimensional metrology concepts pertaining to SPM is given by Griffith J E and Grigg D A 1993 J. Appl. Phys. 74 R83
2. Jorgensen J F, Dagata J, Garnaes J, Jensen C P, Kramar J and Teague C 1994 'Statistical data analysis of SPM images' Invited Talk at the 3rd Workshop on Industrial Applications of Scanned Probe Microscopy (Gaithersburg, MD, 1996) Jorgensen J F, Carneiro K, Madsen L L and Conradsen K 1994 J. Vac. Sci. Technol. B 12 1702
3. Jorgensen J F, Dagata J, Garnaes J, Jensen C P, Kramar J and Teague C 1994 'Statistical data analysis of SPM images' Invited Talk at the 3rd Workshop on Industrial Applications of Scanned Probe Microscopy (Gaithersburg, MD, 1996) Jorgensen J F, Carneiro K, Madsen L L and Conradsen K 1994 J. Vac. Sci. Technol. B 12 1702
4. Available from VLSI Standards Inc, San Jose, CA.
5. Keller D J and Franke F S 1993 Surf. Sci. 294 409
6. Williams P M, Shakesheff K M, Davies M C, Jackson D E, Roberts C J and Tendler SJB 1996 J. Vac. Sci. Technol. B 14 1557
7. Schneir J, Villarubia J S, McWaid T H, Tsai V W and Dixson R 1996 J. Vac. Sci. Technol. B 14 1540