SCOPUS 정보 검색 플랫폼

Journal of the Electrochemical Society

Volumn 146, Issue 11, 1999, Pages 4303-4308

In situ phosphorus doping during silicon epitaxy in an ultrahigh vacuum rapid thermal chemical vapor deposition reactor

(2) Ban, Ibrahim a Ozturk M C a

a North Carolina State University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; EPITAXIAL GROWTH; FILM GROWTH; INTERFACES (MATERIALS); PHOSPHORUS; SEMICONDUCTING FILMS; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH; THERMAL EFFECTS;

SELECTIVE EPITAXY; STICKING COEFFICIENT;

SEMICONDUCTING SILICON;

EID: 0033337063 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1392631 Document Type: Article

Times cited : (6)

References (37)

1
- 0026742666
- M. Aoki, T. Ishii, T. Yoshimura, and Y. Kiyota, IEEE Electron Device Lett., EDL-13, 50 (1992).
- (1992) IEEE Electron Device Lett. , vol.EDL-13 , pp. 50
- Aoki, M.¹ Ishii, T.² Yoshimura, T.³ Kiyota, Y.⁴

2
- 12944285483
- Paper presented Washington, DC
- T. Ohguro, K. Yamada, N. Sugiyama, K. Usuda, Y. Akasaka, T. Yoshitomo, C. Fiegna, M. Ono, M. Saito, and H. Iwai, Paper presented at International Electron Device Meeting, Washington, DC (1993).
- (1993) International Electron Device Meeting
- Ohguro, T.¹ Yamada, K.² Sugiyama, N.³ Usuda, K.⁴ Akasaka, Y.⁵ Yoshitomo, T.⁶ Fiegna, C.⁷ Ono, M.⁸ Saito, M.⁹ Iwai, H.¹⁰

3
- 0029707035
- H. Matsuhashi, T. Ochiai, M. Kasai, T. Nakamura, and S. Nishikawa, in Technical Digest of Symposium VLSI Technology, pp. 36-37 (1996).
- (1996) Technical Digest of Symposium VLSI Technology , pp. 36-37
- Matsuhashi, H.¹ Ochiai, T.² Kasai, M.³ Nakamura, T.⁴ Nishikawa, S.⁵

4
- 0014570031
- T. B. Swanson and R. N. Tucker, J. Electrochem. Soc., 116, 1271 (1969).
- (1969) J. Electrochem. Soc. , vol.116 , pp. 1271
- Swanson, T.B.¹ Tucker, R.N.²

5
- 0343180799
- P. Rai-Choudhury and E. I. Salkovilz, J. Cryst. Growth, 7, 353 (1970).
- (1970) J. Cryst. Growth , vol.7 , pp. 353
- Rai-Choudhury, P.¹ Salkovilz, E.I.²

6
- 12944251747
- J. Bloem, J. Cryst. Growth, 13/14, 302 (1972).
- (1972) J. Cryst. Growth , vol.13-14 , pp. 302
- Bloem, J.¹

7
- 0016114041
- J. Bloem, L. J. Giling, and M. W. M. Graef, J. Electrochem. Soc., 121, 1354 (1974).
- (1974) J. Electrochem. Soc. , vol.121 , pp. 1354
- Bloem, J.¹ Giling, L.J.² Graef, M.W.M.³

8
- 84975395979
- R. F. C. Farrow and J. D. Filby, J. Electrochem. Soc., 118, 149 (1971).
- (1971) J. Electrochem. Soc. , vol.118 , pp. 149
- Farrow, R.F.C.¹ Filby, J.D.²

9
- 0015573880
- F. C. Eversteyn and B. H. Put, J. Electrochem. Soc., 120, 106 (1973).
- (1973) J. Electrochem. Soc. , vol.120 , pp. 106
- Eversteyn, F.C.¹ Put, B.H.²

10
- 0020202883
- H. Kurokawa, J. Electrochem. Soc., 129, 2620 (1982).
- (1982) J. Electrochem. Soc. , vol.129 , pp. 2620
- Kurokawa, H.¹

11
- 0021513163
- B. S. Meyerson and W. Olbricht, J. Electrochem. Soc., 131, 2361 (1984).
- (1984) J. Electrochem. Soc. , vol.131 , pp. 2361
- Meyerson, B.S.¹ Olbricht, W.²

12
- 0021515644
- B. S. Meyerson and M. L. Yu, J. Electrochem. Soc., 131, 2366 (1984).
- (1984) J. Electrochem. Soc. , vol.131 , pp. 2366
- Meyerson, B.S.¹ Yu, M.L.²

13
- 0006534239
- M. Racanelli and D. W. Greve, J. Vac. Sci. Technol. B, 9, 2017 (1991).
- (1991) J. Vac. Sci. Technol. B , vol.9 , pp. 2017
- Racanelli, M.¹ Greve, D.W.²

14
- 0029392285
- S.-M. Jang, K. Liao, and R. Reif, J. Electrochem. Soc., 142, 3520 (1995).
- (1995) J. Electrochem. Soc. , vol.142 , pp. 3520
- Jang, S.-M.¹ Liao, K.² Reif, R.³

15
- 0030540775
- C. Li, S. John, E. Quinones, and S. Banarjee, J. Vac. Sci. Technol. A, 14, 170 (1996).
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 170
- Li, C.¹ John, S.² Quinones, E.³ Banarjee, S.⁴

16
- 0004389723
- S.-M. Jang, K. Liao, and R. Reif, Appl. Phys. Lett., 63, 1675 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1675
- Jang, S.-M.¹ Liao, K.² Reif, R.³

17
- 0000007555
- M. K. Sanganeria, K. E. Violette, and M. C. Öztürk, Appl. Phys. Lett., 63, 1225 (1993).
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1225
- Sanganeria, M.K.¹ Violette, K.E.² Öztürk, M.C.³

18
- 0002734995
- K. E. Violette, P. O'Neil, M. C. Öztürk, K. Christensen, and D. M. Maher, Appl. Phys. Lett., 68, 66 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 66
- Violette, K.E.¹ O'Neil, P.² Öztürk, M.C.³ Christensen, K.⁴ Maher, D.M.⁵

19
- 0030263762
- K. E. Violette, P. A. O'Neil, M. C. Öztürk, K. Christensen, and D. M. Maher, J. Electrochem. Soc., 143, 3290 (1996).
- (1996) J. Electrochem. Soc. , vol.143 , pp. 3290
- Violette, K.E.¹ O'Neil, P.A.² Öztürk, M.C.³ Christensen, K.⁴ Maher, D.M.⁵

20
- 0033100366
- I. Ban, M. C. Öztürk, V. Misra, J. J. Wortman, D. Venables, and D. M. Maher, J. Electrochem. Soc., 146, 1189 (1999).
- (1999) J. Electrochem. Soc. , vol.146 , pp. 1189
- Ban, I.¹ Öztürk, M.C.² Misra, V.³ Wortman, J.J.⁴ Venables, D.⁵ Maher, D.M.⁶

21
- 36449000788
- M. K. Sanganeria, M. C. Öztürk, K. E. Violette, G. Harris, C. A. Lee, and D. M. Maher, Appl. Phys. Lett., 66, 1255 (1995).
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1255
- Sanganeria, M.K.¹ Öztürk, M.C.² Violette, K.E.³ Harris, G.⁴ Lee, C.A.⁵ Maher, D.M.⁶

22
- 0029409365
- M. K. Sanganeria, M. C. Öztürk, G. Harris, K. E. Violette, I. Ban, C. A. Lee, and D. Maher, J. Electrochem. Soc., 142, 3961 (1995).
- (1995) J. Electrochem. Soc. , vol.142 , pp. 3961
- Sanganeria, M.K.¹ Öztürk, M.C.² Harris, G.³ Violette, K.E.⁴ Ban, I.⁵ Lee, C.A.⁶ Maher, D.⁷

23
- 0031234537
- P. A. O'Neil, M. C. Öztürk, K. E. Violette, D. Batchelor, K. Christensen, and D. M. Maher, J. Electrochem. Soc., 144, 3309 (1997).
- (1997) J. Electrochem. Soc. , vol.144 , pp. 3309
- O'Neil, P.A.¹ Öztürk, M.C.² Violette, K.E.³ Batchelor, D.⁴ Christensen, K.⁵ Maher, D.M.⁶

24
- 0000957503
- T. O. Sedgwick, P. D. Agnello, D. N. Ngoc, T. S. Kuan, and G. Scilla, Appl. Phys. Lett., 58, 1896 (1991).
- (1991) Appl. Phys. Lett. , vol.58 , pp. 1896
- Sedgwick, T.O.¹ Agnello, P.D.² Ngoc, D.N.³ Kuan, T.S.⁴ Scilla, G.⁵

25
- 0027662620
- P. D. Agnello, T. O. Sedgwick, and J. Cotte, J. Electrochem. Soc., 140, 2703 (1993).
- (1993) J. Electrochem. Soc. , vol.140 , pp. 2703
- Agnello, P.D.¹ Sedgwick, T.O.² Cotte, J.³

26
- 0000535022
- M. L. Yu and B. S. Meyerson, J. Vac. Sci. Technol. A, 2, 446 (1984).
- (1984) J. Vac. Sci. Technol. A , vol.2 , pp. 446
- Yu, M.L.¹ Meyerson, B.S.²

27
- 36549097443
- M. L. Yu, D. J. Vitkavage, and B. S. Meyerson, J. Appl. Phys., 59, 4032 (1986).
- (1986) J. Appl. Phys. , vol.59 , pp. 4032
- Yu, M.L.¹ Vitkavage, D.J.² Meyerson, B.S.³

28
- 0001437474
- Y. Ohshita and H. Kitajima, J. Appl. Phys., 70, 1871 (1991).
- (1991) J. Appl. Phys. , vol.70 , pp. 1871
- Ohshita, Y.¹ Kitajima, H.²

29
- 0020125547
- R. Reif, J. Electrochem. Soc., 129, 1122 (1982).
- (1982) J. Electrochem. Soc. , vol.129 , pp. 1122
- Reif, R.¹

30
- 0003798188
- ™ Outokumpu Research Oy, Pori, Finland
- ™ Outokumpu Research Oy, Pori, Finland (1994).
- (1994) HSC Chemistry for Windows

31
- 0022387809
- J. A. D. Alamo and R. M. Swanson, J. Electrochem. Soc., 132, 3011 (1985).
- (1985) J. Electrochem. Soc. , vol.132 , pp. 3011
- Alamo, J.A.D.¹ Swanson, R.M.²

32
- 0040914077
- J. H. Comfort and R. Reif, J. Appl. Phys., 65, 1053 (1989).
- (1989) J. Appl. Phys. , vol.65 , pp. 1053
- Comfort, J.H.¹ Reif, R.²

33
- 84912980006
- R. I. G. Uhrberg, R. D. Bringans, R. Z. Bachrach, and J. E. Northrup, J. Vac. Sci. Technol. A, 4, 1259 (1986).
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 1259
- Uhrberg, R.I.G.¹ Bringans, R.D.² Bachrach, R.Z.³ Northrup, J.E.⁴

34
- 0038896784
- L. P. Chen, G. W. Huang, and C. Y. Chang, Appl. Phys. Lett., 68, 1498 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1498
- Chen, L.P.¹ Huang, G.W.² Chang, C.Y.³

35
- 0029207688
- M. K. Sanganeria, K. E. Violette, M. C. Öztürk, G. Harris, and D. M. Maher, J. Electrochem. Soc., 142, 285 (1995).
- (1995) J. Electrochem. Soc. , vol.142 , pp. 285
- Sanganeria, M.K.¹ Violette, K.E.² Öztürk, M.C.³ Harris, G.⁴ Maher, D.M.⁵

36
- 0030540775
- C. Li, S. John, E. Quinones, and S. Banerjee, J. Vac. Sci. Technol. A, 14, 170 (1996).
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 170
- Li, C.¹ John, S.² Quinones, E.³ Banerjee, S.⁴

37
- 0008103079
- P. J. Roksnoer, J. W. F. M. Maes, A. T. Vink, C. J. Vriezema, and P. C. Zalm, Appl. Phys. Lett., 59, 3297 (1991).
- (1991) Appl. Phys. Lett. , vol.59 , pp. 3297
- Roksnoer, P.J.¹ Maes, J.W.F.M.² Vink, A.T.³ Vriezema, C.J.⁴ Zalm, P.C.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.