Crystallographic orientation control for ferroelectric SBT and SBTN thin films from photosensitive mod solutions

Integrated Ferroelectrics

Volumn 22, Issue 1-4, 1998, Pages 55-63

  Sun, Shan ^a   Belsick, John ^a   Uchida, Hiroto ^b,c   Atsuki, Tsutomu ^b,c  

^a Ramtron International Corporation   (United States)

^b MITSUBISHI MATERIALS CORPORATION   (Japan)

^c Symetrix Corporation   (United States)

Author keywords

Crystallographic orientation; Ferroelectric thin films; SBT; SBTN

Indexed keywords

ANNEALING; CAPACITORS; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; FERROELECTRIC MATERIALS; FILM PREPARATION; ORGANOMETALLICS; PHOTOSENSITIVITY; PYROLYSIS; SUBSTRATES; THIN FILM DEVICES; ULTRAVIOLET RADIATION;

METAL-ORGANIC DECOMPOSITION (MOD) SOLUTIONS; STRONTIUM BISMUTH TANTALATE; STRONTIUM BISMUTH TANTALATE NIOBATE;

DIELECTRIC FILMS;

EID: 0032321104     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589808208029     Document Type: Article

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