Ferroelectric SrBi2Ta2O9 thin film deposition at 550°C by plasma-enhanced metalorganic chemical vapor deposition onto a metalorganic chemical vapor deposition platinum bottom electrode

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 1, 1999, Pages 83-87

  Seong, Nak Jin ^a   Choi, Eun Suck ^a   Yoon, Soon Gil ^a,b  

^a Chungnam National University   (South Korea)

^b Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004988169     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581554     Document Type: Article

References (18)

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