Performance of Pd/Ge/Au/Pd/Au ohmic contacts and its application to GaAs metal-semiconductor field-effect transistors

Solid-State Electronics

Volumn 43, Issue 10, 1999, Pages 1893-1900

  Lim, Jong Won ^a   Mun, Jae Kyoung ^a   Kwak, Myeong Hyeon ^a   Lee, Jae Jin ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY OF SOLIDS; GOLD; INTERFACES (MATERIALS); OHMIC CONTACTS; PALLADIUM; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING GERMANIUM; SUBSTRATES; THERMODYNAMIC STABILITY; X RAY DIFFRACTION ANALYSIS;

AUGER DEPTH PROFILE;

MESFET DEVICES;

EID: 0033328523     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(99)00149-5     Document Type: Article

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