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Volumn 35, Issue 4 SUPPL. B, 1996, Pages 2433-2439
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Simulation of a pulse time-modulated bulk plasma in Cl2
a
a
NEC CORPORATION
(Japan)
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Author keywords
Cl2; Electron density; Electron temperature; Negative ion density; Simulation; Time modulated plasma
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Indexed keywords
CARRIER CONCENTRATION;
CHLORINE COMPOUNDS;
COMPUTER SIMULATION;
ELECTRIC CURRENTS;
ELECTRIC FIELDS;
ELECTRON CYCLOTRON RESONANCE;
ELECTRON TRANSPORT PROPERTIES;
ELECTRONS;
PLASMA COLLISION PROCESSES;
PLASMA ETCHING;
PLASMA SHEATHS;
PULSE TIME MODULATION;
CALCULATED TIME CONSTANTS;
ELECTRON CYCLOTRON RESONANCE PLASMA;
ELECTRON DETACHMENT;
NEGATIVE ION DENSITIES;
POSITIVE ION DENSITY;
PULSE DURATION TIME;
PULSE INTERVAL;
PULSE TIME MODULATED BULK PLASMA;
SATURATION CURRENT RATIO;
PLASMAS;
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EID: 0030121187
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.35.2433 Document Type: Article |
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Times cited : (28)
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References (15)
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