Interdiffusion in (Pb1-xLax)(ZryTi1-y) 1-x/4O3/SrRuO3 multilayer thin films examined by secondary ions mass spectroscopy

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 8, 1998, Pages 4533-4538

  Ling, Yong Chien ^a   Lee, Jih Hsin ^a   Liu, Kuo Shung ^a   Tseng, Tzu Feng ^a   Tseng, Yung Kuan ^a   Lin, I Nan ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Ferroelectric thin films; PLZT; SIMS

Indexed keywords

FERROELECTRICITY; INTERDIFFUSION (SOLIDS); SECONDARY ION MASS SPECTROMETRY; SUBSTRATES; THIN FILMS;

FERROELECTRIC THIN FILMS;

MULTILAYERS;

EID: 0032131040     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.4533     Document Type: Article

References (19)

1. J. F. Scott and C. A. P. de Araujo: Science 246 (1989) 1400.
2. C. A. P. de Araujo, L. D. McMillan, B. M. Melnick, J. D. Cuchiaro and J. F. Scott: Ferroelectric 104 (1990) 241.
3. R. Moazzami, C. Hu and W. H. Shepherd: IEEE Trans. Electron Devices 39 (1992) 2044.
4. G. H. Haertling: J. Vac. Sci. & Technol. A 9 (1991) 414.
5. R. Ramesh, W. K. Chan, B. Wilkens, H. Gilchrist, T. Sands, J. M. Tarascon, V. G. Keramidas, D. K. Fork, J. Lee and A. Safari: Appl. Phys. Lett. 61 (1992) 1537.
6. R. Ramesh, T. Sands and V. G. Keramids and D. K. Fork: Mater. Sci. Eng. B 22 (1994) 283.
7. L. A. Bursill, I. M. Reaney, D. P. Vijay and S. B. Desu: J. Appl. Phys. 75 (1994) 1521.
8. C.B. Eom, R. B. Van Dover, Julia M. Phillips, D. J. Werder, J. H. Marshall, C. H. Chen and D. K. Fork: Appl. Phys. Lett. 63 (1993) 2570.
9. R. Ramesh, H. Gilchrist, T. Sands, V. G. Keramids, R. Haakenaasen and D. K. Fork: Appl. Phys. Lett. 63 (1993) 3592.
10. S. Trusty: Electrodes of Conductive Metallic Oxides (Elsevier Scientific, New York, 1980).
11. H. F. Cheng, C. T. Hu and I. N. Lin: Jpn. J. Appl. Phys. 36 (1997) 284.
12. O. X. Jia, D. S. Zhou, S. R. Foltyn, X. D. Wu, A. T. Findikogbe and J. L. Smith: Philos. Mag. B 75 (1997) 261.
13. N. Hamada: J. Phys. Chem. Solids 54 (1993) 1157.
14. M. Hiratami, C. Okazaki, K. Imagawa and K. Takagi: Jpn. S. Appl. Phys. 35 (1996) 6212.
15. X. P. Wu, S. R. Foltyn, R. C. Dye, Y. Coulter and R. E. Muenchausen: Appl. Phys. Lett. 62 (1993) 2434.
16. K. Watanabe, M. Ami and M. Tanaka: Mater. Res. Bull. 32 (1997) 83.
17. F. Chu, O. X. Jia, G. Landrum, X. D. Wu, M. Hawley and T. E. Mitchell: J. Electron. Mater. 25 (1996) 1754.
18. O. X. Jia, X. D. Wu, S. R. Foltyn and P. Tiwari: Appl. Phys. Lett. 66 (1995) 2197.
19. Secondary Ion Mass Spectrometry: A Practical Handbook for Depth Profiling and Bulk Impurity Analysis, eds. R. G. Wilson, F. A. Stevie and C. W. Magee (Wiley, New York, 1989) Chap. 3. 3-3.