Film properties of low-density and ultra-low-dielectric-constant material

Materials Research Society Symposium - Proceedings

Volumn 565, Issue , 1999, Pages 63-68

  Muraguchi, Ryo ^a   Egami, Miki ^a   Arao, Hiroki ^a   Tounai, Atsushi ^a   Nakashima, Akira ^a   Komatsu, Michio ^a  

^a Catalysts and Chemicals Ind Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ORGANIC POLYMERS; PERMITTIVITY; PORE SIZE; POROUS MATERIALS; PYROLYSIS;

FILM PROPERTIES; SPIN-ON GLASS MATERIAL; ULTRALOW DIELECTRIC CONSTANT MATERIAL;

DIELECTRIC FILMS;

EID: 0033300080     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-565-63     Document Type: Article

References (10)

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