Fabrication and characterization of spin-on silica xerogel films

Materials Research Society Symposium - Proceedings

Volumn 511, Issue , 1998, Pages 99-104

  Nitta, S ^a   Jain, A ^a   Pisupatti, V ^a   Gill, W N ^a   Wayner Jr , P C ^a   Plawsky, J L ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; AGING OF MATERIALS; DIFFUSION; FILM PREPARATION; MATHEMATICAL MODELS; MICROSTRUCTURE; PERMITTIVITY; PERMITTIVITY MEASUREMENT; POROSITY; PRESSURE EFFECTS; SILICA GEL;

AMBIENT PRESSURE TECHNIQUE; CONVECTIVE DIFFUSION MODEL; SPIN ON SILICA XEROGEL FILMS;

DIELECTRIC FILMS;

EID: 0032299295     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-511-99     Document Type: Conference Paper

References (28)