Application of thin-film micromachining for large-area substrates

Materials Research Society Symposium - Proceedings

Volumn 557, Issue , 1999, Pages 799-807

  Boucinha, M ^a   Chu, V ^a   Soares, V ^a   Conde, J P ^a  

^a INESC   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; CANTILEVER BRIDGES; CRYSTALLINE MATERIALS; GLASS; LOW TEMPERATURE OPERATIONS; MECHANICAL PROPERTIES; MICROMACHINING; SILICON NITRIDE; SUBSTRATES; SURFACES;

ALUMINUM FILMS; ELECTROSTATIC ACTUATION; MICROCRYSTALLINE SILICON;

THIN FILM TRANSISTORS;

EID: 0033298795     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-557-799     Document Type: Article

References (20)

1. W. Lang, Materials Science and Engineering, R17, p. l (1996).
2. E. M. Kussul, D. A. Rachkovskij, T. N. Baidyk and S. A. Talayev, J. Micromech. Microeng. 6, p. 410 (1996).
3. J. J. Sniegowsky, Solid State Technology, Feb. 1996, p.83.
4. J. Baliga, Semiconductor International, March 1999, p. 34.
5. R.T. Howe, B.E. Böser, A.P. Pisano, Sens. Actuators A 56, p. 167 (1996).
6. A. N. Cleland and M. L. Roukas, Appl. Phys. Lett. 69, p. 2653 (1996).
7. J. Hoffman, D. Wagner and A. Dribnak, Solid State Technology, October 1998, p. 123.
8. N. Vandelli, D. Wroblewski, M. Velonis, and T. Bifano, Journal of Microelectromechanical Systems 7, p. 395 (1998). .
9. S. M. Sze, Semiconductor Sensors, John Wiley & Sons, New York, 1994.
10. H. L. Kwok, EleclfonicMaterials, PWS Publishing, Boston, 1997.
11. R. T. Howe, J. Vac. Sei. Technol. B 6, p.1809 (1988).
12. D. W. Burns and H. Guckel, J. Vac. Sei. Technol. A 8, p. 3606 (1990).
13. K. R. Williams and R. S. Muller, Journal of Microelectromechanical Systems 5, p. 256 (1996).
14. R.T. Howe, R.S. Muller, J. Electrochem. Soc.: Solid State Science and Technology 103, 1420 (1983).
15. R. Maboudian, R.T. Howe, J. Vac. Sei. Technol. B 15, p. 1 (1997).
16. R. A. Street, Hydrogenated Amorphous Silicon, Cambridge University Press, Cambridge, 1991.
17. Amorphous andMicrocrystalline Semiconductor Devices, edited by J. Karicki, Artech House, Norwood, MA, 1991.
18. M. Boucinha, V. Chu, and J. P. Conde, Appl. Phys. Lett. 73, p. 502 (1998).
19. F.C. Marques, P. Wickboldt, D. Pang, J.H. Chen, and W. Paul, J. Appl. Phys. 84, 3118 (1998).
20. F. P. Beer and E. R. Johnston Jr., Mechanics of materials. Me Graw-Hill, London, 1992.