Fabrication of planar silicon nanowires on silicon-on-insulator using stress limited oxidation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2825-2828

  Kedzierski, Jakub ^a   Bokor, Jeffrey ^a   Kisielowski, Christian ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000135518     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589736     Document Type: Article

References (6)

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6. P. Sutardja, Dissertation, University of California at Berkeley, 1988.