Control in sub-100 nm lithography in SAL-601

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2327-2331

  Dobisz, Elizabeth A ^a   Marrian, Christie R K ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001318692     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589639     Document Type: Article

References (13)

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