Fabrication method for IC-oriented Si twin-island single-electron transistors

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 123-126

  Ono, Yukinori ^a   Takahashi, Yasuo ^a   Yamazaki, Kenji ^a   Nagase, Masao ^a   Namatsu, Hideo ^a   Kurihara, Kenji ^a   Murase, Katsumi ^a  

^a Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT MANUFACTURE; LOGIC CIRCUITS; LSI CIRCUITS;

SINGLE ELECTRON TRANSISTORS (SET);

MOSFET DEVICES;

EID: 0032284165     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)