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Volumn 3, Issue 4, 1999, Pages 253-262

Transient thermography of semiconductors using the evanescent microwave microscope

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EID: 0033235189     PISSN: 10893954     EISSN: 10893954     Source Type: Journal    
DOI: 10.1080/108939599199675     Document Type: Article
Times cited : (8)

References (22)
  • 1
    • 36149016205 scopus 로고
    • Theory of Diffraction by Small Holes
    • H. A. Bethe, Theory of Diffraction by Small Holes. Phys. Rev., vol. 66. p. 163-182. 1944.
    • (1944) Phys. Rev. , vol.66 , pp. 163-182
    • Bethe, H.A.1
  • 2
    • 21544471677 scopus 로고
    • A Microwave Magnetic Microscope
    • R. F. Soohoo. A Microwave Magnetic Microscope. J. Appl. Phys., vol. 33. p. 1276-1277, 1962.
    • (1962) J. Appl. Phys. , vol.33 , pp. 1276-1277
    • Soohoo, R.F.1
  • 3
    • 33745465986 scopus 로고
    • Super-resolution Aperture Scanning Microscope
    • E. A. Ash and G. Nicholls, Super-resolution Aperture Scanning Microscope. Nature (Lond). vol. 237, p. 510. 1972.
    • (1972) Nature (Lond) , vol.237 , pp. 510
    • Ash, E.A.1    Nicholls, G.2
  • 4
    • 0027589681 scopus 로고
    • Nondestructive Characterization of Materials by Evanescent Microwaves
    • M. Tabib-Azar, N. S. Shoemaker, and S. Harris. Nondestructive Characterization of Materials by Evanescent Microwaves, Measure Sci. Technol., vol. 4. pp. 583-590, 1993.
    • (1993) Measure Sci. Technol. , vol.4 , pp. 583-590
    • Tabib-Azar, M.1    Shoemaker, N.S.2    Harris, S.3
  • 6
    • 0032607216 scopus 로고    scopus 로고
    • Nondestructive Super-Resolution Imaging of Defects and Nonuniformities in Metals, Semiconductors, Dielectrics. Composites, and Plants Using Evanescent Microwaves
    • M. Tabib-Azar, P. S. Pathak, G. Ponchak, and S. R. LeClair. Nondestructive Super-Resolution Imaging of Defects and Nonuniformities in Metals, Semiconductors, Dielectrics. Composites, and Plants Using Evanescent Microwaves. Rev. Sci. lustrum., vol. 70. no. 6. pp. 2783-2792, 1999.
    • (1999) Rev. Sci. Lustrum. , vol.70 , Issue.6 , pp. 2783-2792
    • Tabib-Azar, M.1    Pathak, P.S.2    Ponchak, G.3    Leclair, S.R.4
  • 7
    • 0001555409 scopus 로고    scopus 로고
    • Evanescent Microwave Probes on High-Resistivity Silicon and Its Application in Characterization of Semiconductors
    • M. Tabib-Azar, D. Akinwande, G. E. Ponchak, and S. R. LeClair, Evanescent Microwave Probes on High-Resistivity Silicon and Its Application in Characterization of Semiconductors, Rev. Sci. lustrum., vol. 70, no. 7. pp. 3083-3086, 1999.
    • (1999) Rev. Sci. Lustrum. , vol.70 , Issue.7 , pp. 3083-3086
    • Tabib-Azar, M.1    Akinwande, D.2    Ponchak, G.E.3    Leclair, S.R.4
  • 8
    • 0032615222 scopus 로고    scopus 로고
    • Novel Physical Sensors Using Evanescent Microwave Probes
    • M. Tabib-Azar, D. Akinwande, G. Ponchak, and S. R. LeGair. Novel Physical Sensors Using Evanescent Microwave Probes. Rev. Sci. lustrum., vol. 70, no. 8. pp. 3381-3386, 1999.
    • (1999) Rev. Sci. Lustrum. , vol.70 , Issue.8 , pp. 3381-3386
    • Tabib-Azar, M.1    Akinwande, D.2    Ponchak, G.3    Legair, S.R.4
  • 9
    • 0032621079 scopus 로고    scopus 로고
    • Transient Thermography Using Evanescent Microwave Microscope
    • M. Tabib-Azar, R. Ciocan, G. E. Ponchak, and S. R. LeClair. Transient Thermography Using Evanescent Microwave Microscope. Rev. Sci. lustrum., vol. 70. 8. pp. 3387-3390, 1999.
    • (1999) Rev. Sci. Lustrum. , vol.70 , Issue.8 , pp. 3387-3390
    • Tabib-Azar, M.1    Ciocan, R.2    Ponchak, G.E.3    Leclair, S.R.4
  • 13
    • 0032620348 scopus 로고    scopus 로고
    • Novel Hydrogen Sensors Using Evanescent Microwave Probes
    • M. Tabib-Azar, and B. Sutapun. Novel Hydrogen Sensors Using Evanescent Microwave Probes. Rev. Sci. lustrum., vol. 70. pp. 3707-3713.
    • Rev. Sci. Lustrum. , vol.70 , pp. 3707-3713
    • Tabib-Azar, M.1    Sutapun, B.2
  • 15
    • 0007994272 scopus 로고
    • Scanning Probe Microscopy of Thermal Conductivity and Substrate Properties
    • M. Nonnenmacher and H. K. Wickramasinghe. Scanning Probe Microscopy of Thermal Conductivity and Substrate Properties. Appl. Phys. Lett., vol. 61. pp. 168-170, 1992.
    • (1992) Appl. Phys. Lett. , vol.61 , pp. 168-170
    • Nonnenmacher, M.1    Wickramasinghe, H.K.2
  • 16
    • 20544448056 scopus 로고
    • Thermal Imaging Using the Atomic Force Microscope
    • A. Majumdar, J. P. Carrejo, and J. Lai. Thermal Imaging Using the Atomic Force Microscope. Appl. Phys. Lett., vol. 62, pp. 2501-2503, 1993.
    • (1993) Appl. Phys. Lett. , vol.62 , pp. 2501-2503
    • Majumdar, A.1    Carrejo, J.P.2    Lai, J.3
  • 17
    • 0028443485 scopus 로고
    • Scanning Near-Field Optical Microscopy and Scanning Thermal Microscopy, Jpn
    • R. J. Pylkki, P. J. Moyer, and P. E. West. Scanning Near-Field Optical Microscopy and Scanning Thermal Microscopy, Jpn, J. Appl Phys., vol. 33. pp. 3785-3790, 1994.
    • (1994) J. Appl Phys. , vol.33 , pp. 3785-3790
    • Pylkki, R.J.1    Moyer, P.J.2    West, P.E.3
  • 18
    • 0001427544 scopus 로고    scopus 로고
    • Nanofabrication of Sensors on Cantilever Probe Tips for Scanning Multiprobe Microscopy
    • K. Luo, Z. Shi, J. Lai, and A. Majumdar. Nanofabrication of Sensors on Cantilever Probe Tips for Scanning Multiprobe Microscopy. Appl. Phs. Lett., vol. 68. pp. 325-327, 1996.
    • (1996) Appl. Phs. Lett. , vol.68 , pp. 325-327
    • Luo, K.1    Shi, Z.2    Lai, J.3    Majumdar, A.4
  • 19
    • 0031102074 scopus 로고    scopus 로고
    • Sensor Nanofabrication. Performance, and Conduction Mechanisms in Scanning Thermal Microscopy
    • K. Luo, Z. Shi, J. Varesi, and A. Majumdar. Sensor Nanofabrication. Performance, and Conduction Mechanisms in Scanning Thermal Microscopy. J. Vacuum Sci. Technol, B. vol. 15. pp. 349-360, 1997.
    • (1997) J. Vacuum Sci. Technol, B , vol.15 , pp. 349-360
    • Luo, K.1    Shi, Z.2    Varesi, J.3    Majumdar, A.4
  • 20
    • 0001951838 scopus 로고    scopus 로고
    • Scanning Joule Expansion Microscopy at Nanometer Scales
    • J. Varesi and A. Majumdar. Scanning Joule Expansion Microscopy at Nanometer Scales. Appl. Phys. Lett., vol. 72, pp. 37-39, 1998.
    • (1998) Appl. Phys. Lett. , vol.72 , pp. 37-39
    • Varesi, J.1    Majumdar, A.2
  • 21
    • 0001048978 scopus 로고    scopus 로고
    • Scanning Thermal Microscopy Using Batch Fabricated Thermocouple Probes
    • G. Mills, H. Zhou, A. Midha, L. Donaldson, and J. M. R. Weaver, Scanning Thermal Microscopy Using Batch Fabricated Thermocouple Probes, Appl. Phys. Lett., vol. 72, pp. 2900-2902, 1998.
    • (1998) Appl. Phys. Lett. , vol.72 , pp. 2900-2902
    • Mills, G.1    Zhou, H.2    Midha, A.3    Donaldson, L.4    Weaver, J.M.R.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.