Self-consistent modelling of low-pressure rf discharges in oxygen plasma

Journal of Physics D: Applied Physics

Volumn 28, Issue 7, 1995, Pages 1346-1353

  Feoktistov, V A ^a   Mukhovatova, A V ^a   Popov, A M ^a   Rakhimova, T V ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347583017     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/28/7/011     Document Type: Article

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