Radiofrequency discharge benchmark model comparison

Plasma Sources Science and Technology

Volumn 4, Issue 1, 1995, Pages 56-73

  Surendra, M ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENCHMARK SYSTEM; BOLTZMANN EQUATION; ELECTRON NUMBER DENSITY; ION FLUX; MONTE CARLO COLLISIONS; PLASMA PARAMETERS;

APPROXIMATION THEORY; ELECTRODES; MATHEMATICAL MODELS; MONTE CARLO METHODS; NUMERICAL METHODS; PLASMA DENSITY;

GLOW DISCHARGES;

EID: 0029250972     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/4/1/007     Document Type: Article

References (54)

1. Dynamics of a collisional, capacitive RF sheath
2. Macroscopic modeling of radio-frequency plasma discharges
3. A Continuum Model of DC and RF Discharges
4. Measurements of Secondary-Electron Spectra Produced by Electron Impact Ionization of a Number of Simple Gases
5. Electron–sheath interaction in capacitive radio-frequency plasmas