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Volumn 71, Issue 4, 1992, Pages 1654-1673

Numerical investigation of the kinetics and chemistry of rf glow discharge plasmas sustained in He, N2, O2, He/N2/O 2, He/CF4/O2, and SiH4/NH 3 using a Monte Carlo-fluid hybrid model

(2) Sommerer, Timothy J a Kushner, Mark J a

a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449007647 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.351196 Document Type: Article

Times cited : (231)

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