In situ sputter deposition of PbTiO3 thin films on different substrates: Influence of the growth temperature and the sputtered lead flux on the perovskite phase formation

Journal of Materials Research

Volumn 12, Issue 4, 1997, Pages 997-1007

  Jaber, B ^a   Remiens D ^a   Thierry, B ^a  

^a UNIVERSITÉ DE VALENCIENNES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; FILM GROWTH; FILM PREPARATION; HEAT FLUX; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PEROVSKITE; PHASE COMPOSITION; SPUTTER DEPOSITION; STOICHIOMETRY; SUBSTRATES; THERMAL EFFECTS;

FERROELECTRIC FILMS; LEAD TITANATE; RADIO FREQUENCY MAGNETRON SPUTTER DEPOSITION;

THIN FILMS;

EID: 0031121130     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0140     Document Type: Article

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