High resolution micro-positioning of a silicon cantilever using sputtered PZT films

Integrated Ferroelectrics

Volumn 17, Issue 1-4, 1997, Pages 309-318

  Jenkins, D F L ^a   Cunningham, M J ^a   Velu, G ^a   Remiens, D ^b  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b UNIVERSITÉ DE VALENCIENNES   (France)

Author keywords

Active vibration control; Ferroelectric thin films; Micro positioners

Indexed keywords

ACTUATORS; BANDWIDTH; DIELECTRIC FILMS; ETCHING; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON; SPUTTER DEPOSITION; SUBSTRATES; THIN FILM DEVICES; VIBRATION CONTROL;

LEAD ZIRCONATE TITANATE;

PIEZOELECTRIC DEVICES;

EID: 0031336577     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708013005     Document Type: Article

References (14)

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