Defects caused by high-energy ion beams, as measured by scanning probe methods

Micron

Volumn 30, Issue 3, 1999, Pages 245-254

  Biro L P ^a   Gyulai, J ^a   Mark G I ^a   Daróczi, Cs S ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

Atomic force microscopy; Ion beam damage; Scanning tunneling microscopy

Indexed keywords

EID: 0033012484     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(99)00009-8     Document Type: Article

References (22)

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