In-depth damage distribution by scanning probe methods in targets irradiated with 200 MeV ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 32-37

  Biro L P ^a,b   Gyulai, J ^a,b   Havancsak K ^c   Didyk, A Yu ^d   Frey, L ^b   Ryssel, H ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

^c EÖTVÖS LORÁND UNIVERSITY   (Hungary)

^d JOINT INSTITUTE FOR NUCLEAR RESEARCH   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DOSIMETRY; GRAPHITE; KRYPTON; MICA; RADIATION DAMAGE; SILICON WAFERS; SURFACE ROUGHNESS; TARGETS;

HIGHLY ORIENTED PYROLITHIC GRAPHITE (HOPG);

ION BOMBARDMENT;

EID: 0031547944     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)01106-8     Document Type: Article

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