Atomic scale investigation of surface modification induced by 215 MeV Ne irradiation on graphite

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 112, Issue 1-4, 1996, Pages 270-274

  Biro L P ^a   Gyulai, J ^a,b   Havancsak K ^c  

^a BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

^b FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS IIS   (Germany)

^c EÖTVÖS LORÁND UNIVERSITY   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

GRAPHITE; ION BOMBARDMENT; RADIATION EFFECTS; SCANNING TUNNELING MICROSCOPY; SURFACE TREATMENT;

ELECTRONIC STOPPING EFFECTS; ION BEAM PROCESSING; NUCLEAR CASCADES;

ION BEAM LITHOGRAPHY;

EID: 0030563521     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01229-X     Document Type: Article

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