Use of atomic-force microscopy and of a parallel irradiation geometry for in-depth characterization of damage produced by swift Kr ions in silicon

Physical Review B - Condensed Matter and Materials Physics

Volumn 54, Issue 17, 1996, Pages 11853-11856

  Biro L ^a   Gyulai, J ^a   Havancsak, K ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b EÖTVÖS LORÁND UNIVERSITY   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000993374     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.54.11853     Document Type: Article

References (12)

1. M. Toulemonde, S. Bouffard and F. Studer, Nucl. Instrum. Methods Phys. Res. Sect. B 91, 108 (1994).
2. G. Szenes, Phys. Rev. B 51, 8026 (1995).
3. A. Dunlop, D. Lesueur and A. Barbu, J. Nucl. Mater. 205, 426 (1993).
4. H. Damak, A. Dunlop and D. Lesueur, Phys. Rev. Lett. 74, 1135 (1995).
5. M. Levalois, P. Bogdanski and M. Toulemonde, Nucl. Instrum. Methods Phys. Res. Sect. B 63, 14 (1992).
6. A. Dunlop, D. Lesueur, P. Legrand and H. Damak, Nucl. Instrum. Methods Phys. Res. Sect. B 90, 330 (1994).
7. F. Thibadau, J. Cousty, E. Balanzat and S. Bouffard, Phys. Rev. Lett. 67, 1582 (1991).
8. P. Bauer, C. Giethmann, M. Kraus, T. Marek, J. Burger, G. Kreiselmeyer, G. Saemann-Ischenko and M. Skibowski, Europhys. Lett. 23, 585 (1993).
9. L. P. Biró, J. Gyulai and K. Havancsak, Phys. Rev. B 52, 2047 (1995).
10. M. Yasutake, S. Wakiyama and Y. Kato, J. Vac. Sci. Technol. B 12, 1572 (1994).
11. J. Biersack and L. Haggmark, Nucl. Instrum. Methods 174, 257 (1980); J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Ranges of Ions in Solids (Pergamon, New York, 1985), Vol. 1.
12. M. Toulemonde, C. Dufour and E. Paumier, Phys. Rev. B 46, 14t362 (1992).