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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3420-3424

Characterization of large-area arrays of nanoscale Si tips fabricated using thermal oxidation and wet etching of Si pillars

(4) Umbach, C C a Weselak, B W a Blakely, J M a Shen, Q a

a School of Operations Research and Industrial Engineering (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007090168 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.588773 Document Type: Article

Times cited : (10)

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