Independent tuning of the linear and nonlinear stiffness coefficients of a micromechanical device

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 32-37

  Adams, Scott G ^a   Bertsch, Fred ^a   MacDonald, Noel C ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRODES; ELECTROSTATIC DEVICES; NATURAL FREQUENCIES; NUMERICAL METHODS; OSCILLATORS (MECHANICAL); REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICON; SINGLE CRYSTALS; STIFFNESS; SYSTEM STABILITY;

ELECTRICAL ISOLATION; ELECTROSTATIC ACTUATORS; LINEAR STIFFNESS COEFFICIENT; MECHANICAL SYSTEM; MICROMECHANICAL DEVICES; NONLINEAR STIFFNESS COEFFICIENT; SINGLE CRYSTAL REACTIVE ETCHING AND METALLIZATION;

ACTUATORS;

EID: 0029769413     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)