High energy ion implantation studies on GaAs and InP

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 156, Issue 1, 1999, Pages 84-89

  Kumar, J ^a  

^a ANNA UNIVERSITY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CRYSTAL DEFECTS; CURRENT VOLTAGE CHARACTERISTICS; HEAVY IONS; ION BOMBARDMENT; LITHIUM; RADIATION DAMAGE; SCHOTTKY BARRIER DIODES; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DOPING; SILICON;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA);

ION IMPLANTATION;

EID: 0032681332     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00276-1     Document Type: Article

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