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Volumn 46, Issue 7, 1995, Pages 633-636
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Study of hydrogen in DLC film by ERDA with 58Ni ions
a a a a b b b b |
Author keywords
[No Author keywords available]
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Indexed keywords
ATOMS;
CARBON;
CHEMICAL ANALYSIS;
CHEMICAL VAPOR DEPOSITION;
DIAMOND FILMS;
IONS;
NICKEL;
PLASMA APPLICATIONS;
SCATTERING;
DEPTH PROFILE;
DIAMOND LIKE CARBON;
ELASTIC RECOIL DETECTION ANALYSIS;
MICROWAVE PLASMA DEPOSITION;
HYDROGEN;
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EID: 0029344290
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/0042-207X(95)00004-6 Document Type: Article |
Times cited : (44)
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References (20)
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