Development of X-ray and extreme ultraviolet (EUV) optical devices for diagnostics and instrumentation for various surface applications

Surface and Interface Analysis

Volumn 27, Issue 4, 1999, Pages 236-246

  Bruch, R ^a   Merabet, H ^a   Bailey, M ^b   Showers, S ^a   Schneider, D ^c  

^a UNIVERSITY OF NEVADA   (United States)

^b DESERT RESEARCH INSTITUTE   (United States)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS; DIFFRACTION GRATINGS; ELECTRON BEAMS; ELECTRON IRRADIATION; FOCUSING; IMAGING TECHNIQUES; ION BEAMS; ION BOMBARDMENT; MIRRORS; POLARIZATION; RADIATION EFFECTS; ULTRAVIOLET RADIATION;

EXTREME ULTRAVIOLET;

X RAY SPECTROMETERS;

EID: 0032679902     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199904)27:4<236::AID-SIA549>3.0.CO;2-9     Document Type: Article

References (50)

1. H. H. Seliger and W. Conrad, Phys. Today Nov., 25 (1995).
2. S. G. Benka and G. B. Lubkin, Phys. Today Nov., 23 (1995).
3. R. Turton, The Quantum Dot. Oxford University Press, Oxford (1996).
4. H. Ahmed, J. Vac. Sci. Technol. B 15, 2101 (1997).
5. J. P. Silverman, J. Vac. Sci. Technol. B 15, 2117 (1997).
6. Silver and S. Kahn, UV and X-Ray Spectroscopy of Laboratory and Astrophysical Plasmas. Cambridge University Press, Cambridge (1993).
7. V. Kantsyrev and R. Bruch, Rev. Sci. Instrum. 68, 771 (1997).
8. R. Bruch, V. Kantsyrev, V. Golovkina, A. Shlyaptseva, I. Golovkin, R. Phaneuf and D. Schneider, Rev. Sci. Instrum. 68, 1091 (1997).
9. V. Kantsyrev and R. Bruch, Phys. Scr. T73, 393 (1997).
10. R. Bruch and V. Kantsyrev, Application of Accelerators in Research and Industry, edited by J. L. Duggan and I. L. Morgan. AIP Press, New York, p. 1055 (1997).
11. V. Kantsyrev, R. Bruch, R. Phaneuf, V. Golovkina, A. Shlyaptseva, D. Schneider and V. Leroux, Application of Accelerators in Research and Industry, edited by J. L. Duggan and I. L. Morgan. AIP Press, New York, p. 181 (1997).
12. R. Bruch, V. Kantsyrev, R. Phaneuf, V. Golovkina, A. Shlyaptseva and D. Schneider, Phys. Scr. T73, 397 (1997).
13. V. Kantsyrev, R. Bruch, M. Bailey and A. Shlyaptseva, Appl. Phys. Lett. 66, 3567 (1995).
14. R. Wedell, Phys. B. 52, 1134 (1996).
15. V. A. Arkadiev, B. Beckhoff, A. A. Bzhaumikov, H. E. Gorny and B. Karmgieber, SPIE 2859, 123 (1996).
16. V. A. Arkadiev, A. A. Bzhaumikov, H. E. Gorny and J. Schmalz, SPIE 2859, 202 (1996).
17. V. L. Kantsyrev, A. Mingaliev, O. Petrukhin, S. Pikus, V. Romanova, T. Shelkovenko, A. Shlyaptseva and A. Faenov, Tech. Phys. Lett. 19, 205 (1993).
18. V. L. Kantsyrev, A. P. Inozemtsev, O. V. Komardin, T. I. Korotkova and A. Shlyaptseva, Quant. Electron. 25, 700 (1995).
19. V. E. Levashov, E. N. Zubarev, A. I. Fedorenko, V. V. Kandratenko, O. V. Poltsera, S. A. Yulin, I. I. Struk and A. V. Vinogradov, Opt. Commun. 109, 1 (1994).
20. N. G. Basov, Yu A. Bykouskii, A. V. Vinogradov and V. L. Kantsyrev, Phys. Chem. Mech. Surf. 4, 2581 (1987).
21. M. Bailey, R. Bruch, A. Shevelko and A. Vasilyev, Rev. Sci. Instrum. 68, 1051 (1997).
22. M. Bailey, PhD Thesis, University of Nevada Reno, Reno (1997), and references herein.
23. J. B. Kortright and M. Rice, Mater. Res. Proc. 461 (1995).
24. H. Merabet, R. Bruch, M. Bailey, B. McConckey and I. Bray, Phys. Rev. A, in press (1999).
25. V. L. Kantsyrev, R. Bruch, R. Phaneuf and N. G. Publicover, J. X-Ray Sci. Technol. 7, 139 (1997).
26. B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics. Wiley, New York (1991).
27. L. Mandel and E. Wolf, Optical Coherence and Quantum Optics. Cambridge University Press, Cambridge (1995).
28. E. S. Glushkin, Rev. Sci. Instrum. 63, 1523 (1992).
29. T. Koide, T. Shidara, M. Yuri, N. Kanadaka, H. Fugutani and K. Yamaduchi, Rev. Sci. Instrum. 63, 1460 (1992).
30. G. D. Waddill, J. G. Tobin, X. Guo and S. Y. Tong, J. Vac. Sci. Technol. B 14, 3152 (1996).
31. J. B. Kortright, H. Kimura, V. Nikitin, K. Mayama, M. Yamamoto and M. Yanagihara, Appl. Phys. Lett. 60, 2963 (1992).
32. J. B. Kortright and J. H. Underwood, Nucl. Instrum. Methods Phys. Res. A 291, 272 (1990).
33. J. G. Tobin, K. W. Goodman, F. O. Schumann, R. F. Willis, J. B. Kortright, J. D. Denlinger, E. Rotenberg, A. Worwick and N. V. Smith, J. Vac. Sci. Technol. A 15, 1766 (1997).
34. S. P. Regan, K. B. Fournier, M. J. May, V. Soukhanovskii, M. Finkenthal and H. W. Moos, Rev. Sci. Instrum. 68, 1002 (1997).
35. T. W. Barbee, Jr., J. C. Rife, W. R. Hunter, M. P. Kowalski, R. G. Cruddace and J. F. Seely, Appl. Opt. 32, 4852 (1993).
36. E. M. Gullikson, personal communication (1993).
37. J. H. Underwood, E. M. Gullikson and K. Nguyen, Appl. Opt. 32, 6985 (1993).
38. E. D. Palik (ed.), Handbook of Optical Constants of Solids. Academic Press, Orlando, FL (1985).
39. J. F. Meekins, R. G. Cruddace and H. Gursky, Appl. Opt. 26, 990 (1987).
40. K. E. Smith, L. C. Dudas, C. B. Stagarescu, J. Downes, D. Korakakis, R. Singh, T. D. Mouistakas, J. Guo and J. Nordgren, J. Vac. Sci. Technol. B 16, 2250 (1998).
41. D. R. Mueller, D. L. Ederer, J. Van Ek, W. L. O'Brein, Q. Y. Dong, J. Jia and T. A. Callcott, Phys. Rev. B 44, 15034 (1996).
42. J. Nordgren, G. Bray, S. Camm, R. Nyholm, J. E. Rubenson and N. Wassgahl, Rev. Sci. Instrum. 60, 1690 (1989).
43. S. Bliman, M. Cornille, A. Langereis, I. Nordgren, R. Bruch, R. Phaneuf, J. Swenson and D. Schneider, Rev. Sci. Instrum. 68, 1080 (1997).
44. V. E. Levashov and A. V. Vinogradov, Appl. Opt. 32, 1130 (1993).
45. D. Schneider and M. A. Briere, Phys. Scr. 53, 228 (1996).
46. G. Marowsky and C. K. Rhodes, Phys. Bl. 52, 991 (1996).
47. Charles K. Rhodes, Opt. Photon. News Sept. (1994).
48. D. Goldhaber-Gordon, M. S. Mantenolo, J. C. Love, G. J. Opiteck and J. C. Ellenbogen, Proc. IEEE, 97, 1 (1997).
49. K. A. Goldberg, R. Beguiristan, J. Bokor, H. Medecki, D. T. Attwood, K. Jackson, E. Tejnil and G. E. Sommargren, J. Vac. Sci. Technol. B 13, 2923 (1995).
50. R. Bruch and D. Schneider, USIC Connect. 4, 4 (1997).