Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 402-407

  Schroth, A ^a   Lee, C ^a   Matsumoto, S ^a   Tanaka, M ^a   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DIELECTRIC FILMS; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; PERMITTIVITY; SOL-GELS; THIN FILM DEVICES;

LEAD ZIRCONATE TITANATE; MICROSCANNERS;

ACTUATORS;

EID: 0031704724     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)