Resonator-based touch-sensitive probe

Sensors and Actuators: A. Physical

Volumn 50, Issue 1-2, 1995, Pages 23-29

  Harb, S M ^a   Vidic, M ^a  

^a Faculty of Engineering and Computing   (United Kingdom)

Author keywords

Resonator based sensors; Touch sensitive probes

Indexed keywords

NATURAL FREQUENCIES; PHASE LOCKED LOOPS; PHASE SHIFT; PIEZOELECTRIC DEVICES; RESONATORS; STRAIN; VIBRATIONS (MECHANICAL);

RESONATOR BASED TOUCH SENSITIVE PROBE;

PROBES;

EID: 0029349886     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(95)01046-7     Document Type: Article

References (16)

1. Renishaw CMM Product Group 'General Product', Renishaw Precision Metrology and Insp. Equip.
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5. Resonant pressure sensor based on piezoelectric properties of ferroelectric thick films
6. Dynamic characteristics of a resonating force transducer
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8. Atomic force microscope - force mapping and profiling on a sub 100 Å scale
9. Measuring profile and position by means of vibrating quartz resonators used as tactile and nontactile sensors
10. Frequency modulation detection using high-Q cantilevers for enhanced force microscope sensitivity
11. A detection technique for scanning force microscopy
12. Novel method for detecting resonant frequency shift in atomic force microscopy