Dynamic behaviour of a quartz extensional-mode non-tactile profile sensor

Sensors and Actuators, A: Physical

Volumn 61, Issue 1-3, 1997, Pages 287-292

  Giousouf, M ^a   Weinmann, M ^a,b   Scheerer, W ^a   Assmus, F ^a   Munch W V ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

^b FESTO AG AND CO KG   (Germany)

Author keywords

Acoustic microscopy; Damping effects; Hydrodynamic friction; Quartz linear extensional mode oscillators

Indexed keywords

ACOUSTIC MICROSCOPES; DAMPING; FRICTION; MATHEMATICAL MODELS; MICROSCOPIC EXAMINATION; OSCILLATORS (ELECTRONIC); QUARTZ APPLICATIONS;

QUARTZ LINEAR EXTENSIONAL MODE OSCILLATORS;

SENSORS;

EID: 0031167490     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80276-2     Document Type: Article

References (5)

1. M. Weinmann, R. Radius, M. W. Engelhardt and F. Assmus, Measuring profile and position by means of vibrating quartz resonators used as tactile and nontactile sensors, Sensors and Actuators A, 37-38 (1993) 715-722.
2. M. Weinmann and F. Assmus, Akustische Flächenprofilerfassung unter Verwendung von Schwingquarzen als Sensoren, VDI-Berichte 939, VDI, Düsseldorf, 1992, p. 453.
3. M. Giousouf and M. Weinmann, Forschungsberichte aus Fein- und Mikrotechnik, IZFM, HS-IFZ, No. 8, 1994, pp. 53-101.
4. L.D. Landau and E.M. Lifschitz, Lehrbuch der Theoretischen Physik; Hydrodynamik, Vol. 6, Akademie Verlag, Berlin, 5th edn., 1991.
5. F. Hund, Theoretische Physik, Vol. 3, Teubner, Stuttgart, 1966, p. 203.