SCOPUS 정보 검색 플랫폼

Volumn 69, Issue , 1999, Pages 345-350

Effect of external stress applied during annealing on hydrogen- and oxygen-implanted silicon

(9) Misiuk, A a Surma, H B a Antonova, I V b Popov, V P b Bak Misiuk, J c Lopez, M d Romano Rodriguez, A d Barcz, A a Jun, J e

a ukasiewicz Research Network Institute of Microelectronics and Photonics (Poland)

b INSTITUTE OF SEMICONDUCTOR PHYSICS (Russian Federation)

c POLISH ACADEMY OF SCIENCES (Poland)

d UNIVERSITY OF BARCELONA (Spain)

e INSTITUTE OF HIGH PRESSURE PHYSICS (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL GROWTH FROM MELT; DISLOCATIONS (CRYSTALS); HYDROGEN; ION IMPLANTATION; OXYGEN; PHOTOLUMINESCENCE; SECONDARY ION MASS SPECTROMETRY; THERMAL DIFFUSION IN SOLIDS; THERMAL STRESS; X RAY ANALYSIS;

X-RAY DIFFUSE SCATTERING;

SILICON WAFERS;

EID: 0032642738 PISSN: 10120394 EISSN: None Source Type: Conference Proceeding
DOI: 10.4028/www.scientific.net/ssp.69-70.345 Document Type: Article

Times cited : (21)

References (10)

1
- 0000160259
- X. Lu, N.W. Cheung, M.D. Strathman, P.K. Chu, B. Doyle, Appl. Phys. Lett. 71 (1997), p.1804.
- (1997) Appl. Phys. Lett. , vol.71 , pp. 1804
- Lu, X.¹ Cheung, N.W.² Strathman, M.D.³ Chu, P.K.⁴ Doyle, B.⁵

2
- 0345042350
- Smolenice, Slovakia 1998, ed. J. Breza, D. Donoval, V. Drobny, F. Uherek
- B. Surma, A. Misiuk, J. Jun, M. Rozental, A. Wnuk, A.G. Ulyashin, I.V. Antonova, V.P. Popov, R. Job, Proceed. ASDAM'98, Smolenice, Slovakia 1998, ed. J. Breza, D. Donoval, V. Drobny, F. Uherek (1998), p. 47.
- (1998) Proceed. ASDAM'98 , pp. 47
- Surma, B.¹ Misiuk, A.² Jun, J.³ Rozental, M.⁴ Wnuk, A.⁵ Ulyashin, A.G.⁶ Antonova, I.V.⁷ Popov, V.P.⁸ Job, R.⁹

3
- 0033249292
- A. Misiuk, B. Surma, L. Rebohle, J. Jun, I.V. Antonova, I. Tyschenko, A. Romano-Rodriguez, M. Lopez, phys. stat. sol.(b) 211 (1999), p. 233.
- (1999) Phys. Stat. Sol.(B) , vol.211 , pp. 233
- Misiuk, A.¹ Surma, B.² Rebohle, L.³ Jun, J.⁴ Antonova, I.V.⁵ Tyschenko, I.⁶ Romano-Rodriguez, A.⁷ Lopez, M.⁸

4
- 0004213943
- A. Misiuk, P. Zaumseil, Electrochem.Soc.Proceed. 95-30 (1995), p.194.
- (1995) Electrochem.Soc.Proceed. , vol.95 , Issue.30 , pp. 194
- Misiuk, A.¹ Zaumseil, P.²

5
- 16944361841
- A. Misiuk, W. Jung, B. Surma, J. Jun, M. Rozental, Solid State Phenomena 57-58 (1997), p.393.
- (1997) Solid State Phenomena , vol.57-58 , pp. 393
- Misiuk, A.¹ Jung, W.² Surma, B.³ Jun, J.⁴ Rozental, M.⁵

6
- 0344611347
- Proceed. DRIP VII
- Templin ed. J. Donecker, I. Rechenberg
- A. Misiuk, P. Zaumseil, I.V. Antonova, J. Ba̧k - Misiuk, E. Bugiel, J. Hartwig, A. Romano -Rodriguez, Proceed. DRIP VII, Templin 1998, ed. J. Donecker, I. Rechenberg, Institute of Physics Conf. Ser. No 160 (1997), p. 273.
- (1997) Institute of Physics Conf. Ser. No 160 , vol.160 , pp. 273
- Misiuk, A.¹ Zaumseil, P.² Antonova, I.V.³ Ba̧k Misiuk, J.⁴ Bugiel, E.⁵ Hartwig, J.⁶ Romano, A.⁷

7
- 0344179810
- submitted to
- I.V. Antonova, E.P. Neustroev, V.P. Popov, A.K. Gutakovskii, A. Misiuk, submitted to phys. stat. sol.
- Phys. Stat. Sol.
- Antonova, I.V.¹ Neustroev, E.P.² Popov, V.P.³ Gutakovskii, A.K.⁴ Misiuk, A.⁵

8
- 0032180678
- M. Tajima, A. Ogura, T. Karasawa, A. Mizoguchi, Jpn.J.Appl.Phys.2, Lett. 37 (1998), p. L1199.
- (1998) Jpn.J.Appl.Phys.2, Lett. , vol.37
- Tajima, M.¹ Ogura, A.² Karasawa, T.³ Mizoguchi, A.⁴

9
- 0032738729
- A. Misiuk, phys. stat. sol. (a) 171 (1999), p. 191.
- (1999) Phys. Stat. Sol. (A) , vol.171 , pp. 191
- Misiuk, A.¹

10
- 0032186870
- I.V. Antonova, A. Misiuk, V.P. Popov, A.E. Plotnikov, B. Surma, Physica B B253 (1998), p.131.
- (1998) Physica B , vol.B253 , pp. 131
- Antonova, I.V.¹ Misiuk, A.² Popov, V.P.³ Plotnikov, A.E.⁴ Surma, B.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.