Urbach energy dependence of the stability in amorphous silicon thin-film transistors

Applied Physics Letters

Volumn 74, Issue 22, 1999, Pages 3374-3376

  Wehrspohn, R B ^a   Deane, S C ^a   French, I D ^a   Gale, I G ^a   Powell, M J ^a   Bruggemann R ^b  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; CORRELATION METHODS; DEGRADATION; DEPOSITION; MATHEMATICAL MODELS; REACTION KINETICS; THERMAL EFFECTS;

FIELD EFFECT MOBILITY; NONSTRETCHED EXPONENTIAL; THERMALIZATION ENERGY; URBACH ENERGY;

THIN FILM TRANSISTORS;

EID: 0032615163     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123349     Document Type: Article

References (17)

1. F. R. Libsch and J. Kanicki, Appl. Phys. Lett. 62, 1286 (1993).
2. C. Chiang, J. Kanicki, and K. Takechi, Jpn. J. Appl. Phys., Part 1 37, 4704 (1998).
3. C. van Berkel and M. J. Powell, Appl. Phys. Lett. 51, 1094 (1987).
4. C. Chiang, C. Chen, and J. Kanicki, IEEE Electron Device Lett. 19, 382 (1998).
5. J. P. Kleider and F. Dayoub, Phys. Rev. B 58, 10401 (1998).
6. M. J. Powell, C. van Berkel, and J. R. Hughes, Appl. Phys. Lett. 54, 1323 (1989).
7. M. J. Powell, C. v. Berkel, A. R. Franklin, S. C. Deane, and W. I. Milne, Phys. Rev. B 45, 4160 (1992).
8. M. J. Powell, C. van Berkel, I. D. French, and D. H. Nicholls, Appl. Phys. Lett. 51, 1242 (1987).
9. M. Stutzmann, Philos. Mag. B 56, 63 (1987).
10. W. B. Jackson, Phys. Rev. B 41, 1059 (1990), and references therein.
11. I. D. French, S. C. Deane, D. T. Murley, J. Hewett, I. G. Gale, and M. J. Powell, Mater. Res. Soc. Symp. Proc. 467, 875 (1997).
12. S. Sherman, S. Wagner, and R. A. Gottscho, Appl. Phys. Lett. 69, 3242 (1996).
13. S. C. Deane, R. B. Wehrspohn, and M. J. Powell, Phys. Rev. B 58, 12625 (1998).
14. M. Stutzmann, Philos. Mag. B 60, 531 (1989).
15. M. J. Powell and S. C. Deane, Phys. Rev. B 53, 10121 (1996).
16. M. Stutzmann, W. B. Jackson, and C. C. Tsai, Phys. Rev. B 32, 23 (1985).
17. R. S. Crandall, Phys. Rev. B 43, 4057 (1990).