Diffraction methods raise interferometer accuracy

Laser Focus World

Volumn 32, Issue 8, 1996, Pages

  Sommargren, Gary E ^a  

^a Biology and Biotechnology Research   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; DIFFRACTION; FABRICATION; INTERFEROMETERS; INTERFEROMETRY; OPTICAL DESIGN; OPTICAL FIBERS; OPTICAL VARIABLES MEASUREMENT; OPTICS; PHOTOLITHOGRAPHY; PROJECTION SYSTEMS;

NUMERICAL APERTURE; WAVELENGTH;

OPTICAL TESTING;

EID: 0030214806     PISSN: 07402511     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)