Enhancement in electron emission from polycrystalline silicon field emitter arrays coated with diamondlike carbon

Journal of Applied Physics

Volumn 84, Issue 6, 1998, Pages 3378-3381

  Mimura, Hidenori ^a   Hashiguchi, Gen ^b   Okada, Morihiro ^c   Matsumoto, Takahiro ^d   Tanaka, Masaki ^d   Yokoo, Kuniyoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b NIPPON STEEL CORPORATION   (Japan)

^c Nippon Stl Semiconduct Corporation   (Japan)

^d JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CHEMICAL VAPOR DEPOSITION; COATINGS; DIELECTRIC FILMS; ELECTRON EMISSION; ETCHING; FABRICATION; ION BEAMS; METHANE; PERMITTIVITY; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON;

ANISOTROPIC ETCHING; DIAMONDLIKE CARBON; TRANSFER MOLD METHOD;

LIGHT EMITTING DIODES;

EID: 0032529935     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368495     Document Type: Article

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