Deposition of molybdenum thin films by an alternate supply of MoCl5 and Zn

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 5, 1998, Pages 2845-2850

  Juppo, Marika ^a   Vehkamäki, Marko ^a   Ritala, Mikko ^a   Leskelä, Markku ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032397435     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581430     Document Type: Article

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