Deposition of copper films by an alternate supply of CuCl and Zn

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 2330-2333

  Juppo, Marika ^a   Ritala, Mikko ^a   Leskelä, Markku ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031523650     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580743     Document Type: Article

References (24)

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