Resonating large angle and low consumption micromachined optical scanner

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3276, Issue , 1998, Pages 96-102

  Calmes, Sam ^a   Schweizer, Sandra ^a   Renaud, Ph ^a  

^a EPFL   (Switzerland)

Author keywords

Bimorph; Microscanner; Optical scanner; Silicon micromachining

Indexed keywords

ACTUATORS; ENERGY UTILIZATION; ETCHING; MASKS; MICROMACHINING; MIRRORS; NATURAL FREQUENCIES; RESIDUAL STRESSES; SCANNING; SILICON; SUBSTRATES; THIN FILMS;

OPTICAL SCANNERS;

INTEGRATED OPTICS;

EID: 0032225647     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.302413     Document Type: Conference Paper

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