Controlled Stepwise Motion in Polysilicon Microstructures

Journal of Microelectromechanical Systems

Volumn 2, Issue 3, 1993, Pages 106-110

  Akiyama, Terunobu ^a   Shono, Katsufusa ^a  

^a SOPHIA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATIC DEVICES; MACHINE DESIGN; MECHANICAL VARIABLES CONTROL; MICROMACHINING; POLYSILANES; ROTORS; SILICON;

CONTROLLED STEPWISE MOTION; POLYSILICON MICROSTRUCTURES; SILICON WAFER; SLIDER;

MICROELECTROMECHANICAL DEVICES;

EID: 0027664612     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.260254     Document Type: Article

References (7)

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