Silicon Micromachined Waveguides for Millimeter-Wave and Submillimeter-Wave Frequencies

IEEE Microwave and Guided Wave Letters

Volumn 3, Issue 3, 1993, Pages 61-63

  McGrath, William R ^a   Walker, Christopher ^b   Yap, Markus ^c   Tai, Yu Chong ^c  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF ARIZONA   (United States)

^c CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; METALLIZING; MICROMACHINING; MILLIMETER WAVES; SILICON NITRIDE;

GOLD PLATED SILICON WAVEGUIDE; INSERTION LOSS MEASUREMENT; SILICON MICROMACHINED WAVEGUIDES;

RECTANGULAR WAVEGUIDES;

EID: 0027559878     PISSN: 10518207     EISSN: None     Source Type: Journal    
DOI: 10.1109/75.205665     Document Type: Article

References (7)

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3. M. Yap and Y.-C. Tai, “Fabrication of silicon rnicromachined waveguide,” to be submitted to 1EEE/ASME J. Microelectromechan. Syst.
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