W-band micromachined vertical interconnection for three-dimensional microwave ICs

1999 29th European Microwave Conference, EuMC 1999

Volumn 3, Issue , 1999, Pages 402-406

  Henick, Katherine J ^a   Yook, Jong Gwan ^a   Robertson, Stephen V ^a   Rebeiz, Gabriel M ^a   Katehi, Linda P B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS;

FINITE-GROUND COPLANAR WAVEGUIDES; MEASURED RESULTS; MICRO-MACHINED; PROCESSING TECHNIQUE; SILICON MICROMACHINING; VERTICAL INTERCONNECTIONS;

COPLANAR WAVEGUIDES;

EID: 84897478410     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMA.1999.338477     Document Type: Conference Paper

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