Influence of electron diffusion on the cathode sheath of a magnetron discharge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 5, 1996, Pages 2736-2743

  Lister, Graeme ^a,b  

^a UNIVERSITY OF SALFORD   (United Kingdom)

^b OSRAM SYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030486548     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580195     Document Type: Article

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