Preconditioned richardson numerical method for thermal analysis in x-ray lithography with cylindrical geometry

Numerical Heat Transfer; Part A: Applications

Volumn 34, Issue 6, 1998, Pages 599-616

  Dai, W ^a   Nassar, R ^a  

^a Louisiana Tech University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ASPECT RATIO; COMPUTER SIMULATION; FINITE DIFFERENCE METHOD; FINITE ELEMENT METHOD; POISSON DISTRIBUTION; PROBLEM SOLVING; SPURIOUS SIGNAL NOISE; THERMOANALYSIS; X RAY LITHOGRAPHY;

DOMAIN DECOMPOSITION ALGORITHMS; PARALLEL GAUSSIAN ELIMINATION METHOD; POISSON EQUATIONS; PRECONDITIONED RICHARDSON NUMERICAL METHOD;

HEAT TRANSFER;

EID: 0032203492     PISSN: 10407782     EISSN: 15210634     Source Type: Journal    
DOI: 10.1080/10407789808914005     Document Type: Article

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