1.5V supplied, CMOS ASIC for the actuation of an electrostatic micromotor

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 25-31

  Favrat, P ^a   Paratte, L ^a   Ballan, H ^a   Declercq, M ^a   de Rooij, N F ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; APPLICATION SPECIFIC INTEGRATED CIRCUITS; ASSEMBLY; CMOS INTEGRATED CIRCUITS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRODES; ELECTROPLATING; FABRICATION; MOTORS; ROTORS; STATORS;

ELECTROSTATIC MICROMOTORS; GATE TO SOURCE VOLTAGE; HIGH VOLTAGE INTEGRATED CIRCUITS; MICROMECHANICAL SYSTEM; THRESHOLD VOLTAGE;

ELECTROSTATIC DEVICES;

EID: 0029774302     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)