A high sensitivity lead-titanate (PbTiO3) pyroelectric thin-film infrared sensor with temperature isolation improvement structure

IEEE Electron Device Letters

Volumn 19, Issue 6, 1998, Pages 189-191

  Ho, Jyh Jier ^a   Fang, Y K ^a   Wu, K H ^a   Hsieh, W T ^a   Chu, C W ^a   Huang, C R ^a   Ju, M S ^a   Chang, C P ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b FORTUNE INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; DIELECTRIC FILMS; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; PYROELECTRICITY; THERMAL EFFECTS;

INFRARED SENSORS; LEAD TITANATE; PYROELECTRIC THIN FILMS; THERMAL ISOLATION;

OPTICAL SENSORS;

EID: 0032099561     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.678539     Document Type: Article

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