Surface-Micromachined Pyroelectric Infrared Imaging Array with Vertically Integrated Signal Processing Circuitry

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 41, Issue 4, 1994, Pages 552-555

  Pham, L ^a   Tjhen, W ^a   Ye, C ^a   Polla, D L ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; HEAT CONDUCTION; INFRARED IMAGING; INTEGRATED CIRCUITS; MICROMACHINING; MICROSTRUCTURE; PERFORMANCE; PYROELECTRICITY; SIGNAL PROCESSING; SURFACES; TRANSISTORS; VOLTAGE MEASUREMENT;

BLACKBODY VOLTAGE RESPONSIVITY; CIRCUIT MINIMIZATION; INTEGRATED FERROELECTRIC MICROSENSORS; LOW THERMAL MASS SUPPORT; POLYSILICON MICROBRIDGES; PYROELECTRIC INFRARED IMAGING; SENSOR INTERCONNECTION; SILICON WAFER; SURFACE MICROMACHINING; THERMAL CONDUCTION PATH;

IMAGE SENSORS;

EID: 0028464427     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.294117     Document Type: Article

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