Electrostatically actuated micro-relay

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 380-383

  Drake, Joe ^a   Jerman, Hal ^a   Lutze, Bob ^a   Stuber, Mike ^a  

^a EG&G   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC RESISTANCE MEASUREMENT; ELECTROSTATIC DEVICES; ELECTROSTATICS; FABRICATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON;

AUTOMATIC TEST EQUIPMENT; ELECTROMAGNETIC RELAY; METALLIZATION; MICRORELAY; POLYSILICON; SOLID STATE RELAY;

ELECTRIC RELAYS;

EID: 0029488142     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)