Characterization of broad-band transmission for coplanar waveguides on cmos silicon substrates

IEEE Transactions on Microwave Theory and Techniques

Volumn 46, Issue 5 PART 2, 1998, Pages 632-640

  Milanovic, Veljko ^a   Ozgur, Mehmet ^b   Degroot, Donald C ^a   Jargon, Jeffrey A ^b   Gaitan, Michael ^a   Zaghloul, Mona E ^b  

^a George Washington University   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

CMOS; Coplanar waveguide; Deembedding; Microwave propagation on silicon substrate; On wafer measurement

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC IMPEDANCE MEASUREMENT; ELECTRIC RESISTANCE; EQUIVALENT CIRCUITS; INTEGRATED CIRCUIT MANUFACTURE; MICROWAVE DEVICES; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MODELS; SILICA; STRIP METAL; SUBSTRATES; THIN FILMS;

MICROWAVE TRANSMISSION; ON WAFER MEASUREMENT;

WAVEGUIDES;

EID: 0032071785     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.668675     Document Type: Article

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